Fabrication of devices having different interfacial oxide thickness via lateral oxidation

ABSTRACT

A method for forming a semiconductor device includes forming a first field effect transistor (FET) and a second FET on a substrate, the first FET comprising a first interfacial oxide layer, and the second FET comprising a second interfacial oxide layer; encapsulating the first interfacial oxide layer of the first FET; and performing lateral oxidation of the second interfacial oxide layer of the second FET, wherein the lateral oxidation of the second interfacial oxide layer of the second FET converts a portion of the substrate located underneath the second FET into additional interfacial oxide.

BACKGROUND

This disclosure relates generally to the field of semiconductor devicefabrication, and more particularly to formation of complementary metaloxide semiconductor (CMOS) devices having interfacial oxide of differentthicknesses on the same chip or substrate.

State of the art integrated circuit (IC) chips must be able to allow awide range of on-chip voltages across devices on the chip, whileincreasing circuit performance and design flexibility. An increasingdemand exists for providing semiconductor chips having devices, such asfield effect transistors (FETs), with interfacial oxide layers ofvarious thicknesses. Interfacial oxide thickness between the device gateand the substrate on which the device is located is a major concern interms of reliability considerations for devices operating at differentvoltage levels. Device scaling trends have led to low voltage operationin devices having relatively thin interfacial oxides, such as devicesthat are used for memory or logic. Other applications may require arelatively thick interfacial oxide, such as driver/receiver circuitry ata chip input/output (I/O) and analog output devices. Thick interfacialoxide is necessary for high voltage devices to ensure reliability, whilethin interfacial oxide is desirable for the relatively fast logicdevices that use low voltages at the gate. However, the use ofrelatively thick interfacial oxide for lower voltage devices can causepoor device performance and significantly decrease speed.

Moreover, with the trend of to forming as many different circuits aspossible on the same substrate, or chip, to achieve more functionalityand/or improve performance, there are even more different possiblecombinations for different parts of circuits in the same chip to havedifferent interfacial oxide thicknesses to achieve the optimizedperformance and reliability at the system level.

One method of forming different interfacial oxide thicknesses on thesame substrate involves multiple masking, strip, and oxide formationsteps. However, such an approach may significantly increase the overallmanufacturing cost and degrade the reliability and yield of themanufacturing process. The interfacial oxide thickness may also bedifficult to control because the thick oxide layer results from thecombination of multiple oxide formation cycles.

Another method for providing multiple interfacial oxide thicknessesemploys a nitrogen implant for retarding the oxidation rate on the thininterfacial oxide devices, while permitting a thicker oxide to growwhere the nitrogen implant has been blocked. However, the use ofnitrogen implants may cause problems. For example, implanting nitrogenat high doses may introduce beam damage in the channel region of FETdevices. This damage in turn results in changes in the channel impuritydistributions as well as introducing silicon defects which can degradesub-threshold voltage leakage (off current), interfacial oxide breakdownvoltage, and device reliability.

BRIEF SUMMARY

In one aspect, a method for forming a semiconductor device includesforming a first field effect transistor (FET) and a second FET on asubstrate, the first FET comprising a first interfacial oxide layer, andthe second FET comprising a second interfacial oxide layer;encapsulating the first interfacial oxide layer of the first FET; andperforming lateral oxidation of the second interfacial oxide layer ofthe second FET, wherein the lateral oxidation of the second interfacialoxide layer of the second FET converts a portion of the substratelocated underneath the second FET into additional interfacial oxide.

In one aspect, a semiconductor device includes a first field effecttransistor (FET) and a second FET located on a substrate, the first FETcomprising a first interfacial oxide layer, and the second FETcomprising a second interfacial oxide layer, wherein the secondinterfacial oxide layer of the second FET is thicker than the firstinterfacial oxide layer of the first FET; and a recess located in thesubstrate adjacent to the second FET.

Additional features are realized through the techniques of the presentexemplary embodiment. Other embodiments are described in detail hereinand are considered a part of what is claimed. For a better understandingof the features of the exemplary embodiment, refer to the descriptionand to the drawings.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

Referring now to the drawings wherein like elements are numbered alikein the several FIGURES:

FIGS. 1A-B are flowcharts illustrating embodiments of methods forfabrication of devices having different interfacial oxide thicknessesvia lateral oxidation.

FIG. 2 is a cross sectional view illustrating an embodiment of devicesformed on a substrate.

FIG. 3 is a cross sectional view illustrating an embodiment the deviceof FIG. 2 after encapsulation of the thin interfacial oxide device.

FIG. 4 is a cross sectional view illustrating an embodiment the deviceof FIG. 3 after lateral oxidation of the interfacial oxide of the thickinterfacial oxide device.

FIG. 5 is a cross sectional view illustrating an embodiment the deviceof FIG. 4 after removal of excess oxide from the substrate.

FIG. 6 is a cross sectional view illustrating an embodiment the deviceof FIG. 2 after oxide liner deposition.

FIG. 7 is a cross sectional view illustrating an embodiment the deviceof FIG. 6 after removal of the oxide liner from the thin interfacialoxide device.

FIG. 8 is a cross sectional view illustrating an embodiment the deviceof FIG. 7 after nitride spacer formation.

FIG. 9 is a cross sectional view illustrating an embodiment the deviceof FIG. 8 after partial removal of the oxide liner from the thickinterfacial oxide device.

FIG. 10 is a cross sectional view illustrating an embodiment the deviceof FIG. 9 after lateral oxidation of the interfacial oxide of the thickinterfacial oxide device.

FIG. 11 is a cross sectional view illustrating an embodiment the deviceof FIG. 10 after removal of excess oxide from the substrate.

DETAILED DESCRIPTION

Embodiments of methods for fabrication of devices having differentinterfacial oxide thicknesses via lateral oxidation, and a substrateincluding devices having different interfacial oxide thicknesses, areprovided, with exemplary embodiments being discussed below in detail.Lateral oxidation may be used to increase the interfacial oxidethickness of devices selected to have a relatively thick interfacialoxide on a substrate. Other devices selected to have a relatively thininterfacial oxide on the substrate are protected during the lateraloxidation of the thick gate oxide devices. Lateral oxidation may beperformed at a relatively high temperature, which may be about 700° C.in some embodiments. The lateral oxidation time period may be relativelylong, about an hour in some embodiments, and the lateral oxidationprocess may include a relatively slow ramp up to the lateral oxidationtemperature.

FIG. 1A illustrates an embodiment of a method 100A for fabrication ofdevices having different interfacial oxide thicknesses via lateraloxidation. FIG. 1A is discussed with reference to FIGS. 2-5. In block101A, a plurality of devices are formed on a substrate, such as thedevices shown in FIG. 2. FIG. 2 shows a cross section of a chip 200 thatincludes a first device 207A, including interfacial oxide 203A,dielectric layer 204A, gate metal 205A, and gate silicon 206A, and asecond device 207B, including interfacial oxide 203B, dielectric layer204B, gate metal 205B, and gate silicon 206B. First device 207A is athin interfacial oxide device, and second device 207B is a thickinterfacial oxide device. The first device 207A and second device 207Bare both located on substrate 201, and are separated by a shallow trenchisolation (STI) region 202. Interfacial oxide 203A-B may include but isnot limited to silicon oxide (SiO₂) or silicon oxynitride (SiON) in someembodiments, and may be formed by growing the oxide on the substrate201. High-k dielectric 204A-B may include but is not limited to hafniumoxide (HfO₂), hafnium silicate (HfSiO), hafnium silicon oxynitride(HfSiON), zirconium oxide (ZrO₂), zirconium silicate (ZrSiO), zirconiumsilicon oxynitride (ZrSiON), aluminum oxide (Al₂O₃), lanthanum oxide(La₂O₃), dysprosium oxide (Dy₂O₃), or mixtures or multilayers thereof,in various embodiments, and may be formed by deposition. High-kdielectric materials that allow for relatively facile diffusion ofoxidizing species, such as HfO₂, may be used in some exemplaryembodiments for high k dielectric 204A-B. Gate metal 205A-B may includebut is not limited to titanium nitride (TiN), tantalum nitride (TaN), ortungsten (W) in some embodiments, and may be formed by deposition. Gatesilicon 206A-B may include polysilicon or amorphous silicon in variousembodiments. Substrate 201 may include but is not limited to silicon orsilicon germanium.

In block 102A, any devices on the substrate selected to have relativelythin interfacial oxide are encapsulated with an oxidation-resistantmaterial. As shown in FIG. 3, first device 207A, including interfacialoxide 203A, is encapsulated by a spacer comprising anoxidation-resistant material 301. Oxidation-resistant material 301 mayinclude a nitride such as silicon nitride (Si₃N₄), and may be formed bydeposition of the oxidation-resistant material, photoresist and/orhardmask patterning followed by reactive ion etching to form the spacer,and wet removal of any oxidation-resistant material formed on the thickinterfacial oxide devices, such as second device 207B.

In block 103A, lateral oxidation of the interfacial oxide 203B of seconddevice 207B is performed, resulting in the device 400 as shown in FIG. 4including thick interfacial oxide 401 in second device 207B. The lateraloxidation of block 103A converts a portion of substrate 201 that islocated underneath second device 207B into interfacial oxide for seconddevice 207B, and also forms excess oxide in substrate 201 adjacent tosecond device 207B. Conditions for the lateral oxidation of block 103Amay be chosen such that the interfacial oxide 401 grows into substrate201 by a pre-determined amount. The lateral oxidation may be performedin a chamber at a low oxygen partial pressure at an appropriately chosentemperature in a range from about 400° C. to about 800° C. (about 700°C. in some embodiments), such that lateral diffusion of oxygen into thegate stack of second device 207B is sufficiently rapid compared to theoxidation rate of the substrate 201 to nearly equilibrate the effectiveoxygen partial pressure in the stack across the second device 207B. Thelateral oxidation of block 103A may include an initial slow temperatureramp-up in an environment that contains the low partial pressures ofoxygen. The lateral oxidation time, including the relatively slow rampup to the relatively high temperature, may be in a range from about 1minute to about 1 day (about 1 hour in some embodiments). The lateraloxidation time and temperature may be adjusted depending on the gatelength of the thick interfacial oxide devices. A high temperature and arelatively long time period for the lateral oxidation of block 103Aallows for formation of thickened interfacial oxide, such as interfacialoxide 401, for devices having relatively large gate lengths.

Lastly, in block 104A, the excess oxide formed in block 103A adjacent tosecond device 207B is removed from substrate 201, forming recesses 501adjacent to second device 207B in the substrate 201, as shown in FIG. 5.After the excess oxide is removed to form recesses 501,oxidation-resistant material 301 may be removed from first device 207A,and gate silicon 206A-B and source/drain regions in substrate 201adjacent to devices 207A-B may be silicided in some embodiments;source/drain silicide for second device 207B is formed in recesses 501.After formation of the gate and source/drain silicide, spacers (notshown) may then be formed on both first device 207A and second device207B.

FIG. 1B illustrates another embodiment of a method 100B for fabricationof devices having different interfacial oxide thicknesses via lateraloxidation, including deposition of an oxide liner to protect the gate ofthe second device during the lateral oxidation step. FIG. 1B isdiscussed with respect to FIGS. 2 and 6-11. In block 101B, a pluralityof devices are formed on a substrate, such as the devices shown in FIG.2, as discussed above with respect to block 101A of FIG. 1A. In block102B, an oxide liner 601 is formed over both the first device 207A andthe second device 207B, as shown in FIG. 6. Oxide liner 601 may beformed by deposition. Then, in block 103B, the portion of oxide liner601 that is located on first device 207A is selectively removed, asshown in FIG. 7, and spacers comprising oxidation-resistant material801A and 801B are formed on both first device 207A and second device207B. Oxidation-resistant material 801A-B may be a nitride such asSi₃N₄, and may be formed by deposition of the oxidation-resistantmaterial, and photoresist and/or hardmask patterning followed byreactive ion etching to form the spacers. Oxidation-resistant material801A encapsulates the interfacial oxide region 203A of first device207A. In block 104B, oxide liner 601 is partially removed from seconddevice 207B to allow access through recess 901 to interfacial oxide203B, as shown in FIG. 9. Oxidation-resistant material 801B preventsremoval of oxide liner 601 from the gate region (including dielectriclayer 204B, gate metal 205B, and gate silicon 206B) of second device207B.

In block 105B, lateral oxidation of the interfacial oxide 203B of seconddevice 207B is performed, resulting in thick interfacial oxide 1001 insecond device 207B as shown in FIG. 10. Oxide liner 601 preventsoxidation of dielectric layer 204B, gate metal 205B, and gate silicon206B during lateral oxidation of interfacial oxide 203B. The lateraloxidation of block 105B converts a portion of substrate 201 that islocated underneath second device 207B into interfacial oxide for seconddevice 207B, and also forms excess oxide in substrate 201 adjacent tosecond device 207B. Conditions for the lateral oxidation of block 105Bmay be chosen such that the interfacial oxide 1001 grows into substrate201 by a pre-determined amount. The lateral oxidation may be performedin a chamber at a low oxygen partial pressure at an appropriately chosentemperature in a range from about 400° C. to about 800° C. (about 700°C. in some embodiments), such that lateral diffusion of oxygen into thegate stack of second device 207B is sufficiently rapid compared to theoxidation rate of the substrate 201 to nearly equilibrate the effectiveoxygen partial pressure in the stack across the second device 207B. Thelateral oxidation of block 105B may include an initial slow temperatureramp-up in an environment that contains the low partial pressures ofinadvertent oxygen. The lateral oxidation time, including the relativelyslow ramp up to the relatively high temperature, may be in a range fromabout 1 minute to about 1 day (about 1 hour in some embodiments). Thelateral oxidation time and temperature may be adjusted depending on thegate length of the thick interfacial oxide devices. A high temperatureand a relatively long time period for the lateral oxidation of block105B allows for formation of thickened interfacial oxide, such asinterfacial oxide 1001, for devices having relatively large gatelengths.

Lastly, in block 106B, excess oxide is removed from substrate 201,forming recesses 1101 adjacent to second device 207B in the substrate201, as shown in FIG. 11. After the excess oxide is removed to formrecesses 1101, oxidation-resistant material 801A may be removed fromfirst device 207A, and oxide liner 601 and oxidation-resistant material801B may be removed from second device 207B. Gate silicon 206A-B andsource/drain regions in substrate 201 adjacent to first and seconddevices 207A-B may then be silicided in some embodiments; source/drainsilicide for second device 207B is formed in recesses 1101. Afterformation of the gate and source/drain silicide, spacers (not shown) maythen be formed on both first device 207A and second device 207B in someembodiments.

First device 207A and second device 207B are shown for illustrativepurposes only; embodiments of method 100 may be used to thicken aninterfacial oxide layer that is located on a semiconductor substrate forany appropriate type of device. For example, method 100 may be appliedto gate-first devices such as metal-inserted poly-Si stack (MIPS) orfull metal gate devices, or alternatively to replacement gate devices,in various embodiments. Further, any appropriate number of thin andthick interfacial oxide devices may be formed on the substrate.

The technical effects and benefits of exemplary embodiments includeformation of devices with differing interfacial oxide thickness that maybe applied to devices having a wide range of gate lengths.

The terminology used herein is for the purpose of describing particularembodiments only and is not intended to be limiting of the invention. Asused herein, the singular forms “a”, “an”, and “the” are intended toinclude the plural forms as well, unless the context clearly indicatesotherwise. It will be further understood that the terms “comprises”and/or “comprising,” when used in this specification, specify thepresence of stated features, integers, steps, operations, elements,and/or components, but do not preclude the presence or addition of oneor more other features, integers, steps, operations, elements,components, and/or groups thereof.

The corresponding structures, materials, acts, and equivalents of allmeans or step plus function elements in the claims below are intended toinclude any structure, material, or act for performing the function incombination with other claimed elements as specifically claimed. Thedescription of the present invention has been presented for purposes ofillustration and description, but is not intended to be exhaustive orlimited to the invention in the form disclosed. Many modifications andvariations will be apparent to those of ordinary skill in the artwithout departing from the scope and spirit of the invention. Theembodiment was chosen and described in order to best explain theprinciples of the invention and the practical application, and to enableothers of ordinary skill in the art to understand the invention forvarious embodiments with various modifications as are suited to theparticular use contemplated.

1. A method for forming a semiconductor device, the method comprising:forming a first field effect transistor (FET) and a second FET on asubstrate, the first FET comprising a first interfacial oxide layer, andthe second FET comprising a second interfacial oxide layer;encapsulating the first interfacial oxide layer of the first FET; andperforming lateral oxidation of the second interfacial oxide layer ofthe second FET, wherein the lateral oxidation of the second interfacialoxide layer of the second FET converts a portion of the substratelocated underneath the second FET into additional interfacial oxide. 2.The method of claim 1, wherein the first and second interfacial oxidelayers comprise one of silicon oxide and silicon oxynitride.
 3. Themethod of claim 1, wherein the substrate comprises one of silicon andsilicon germanium.
 4. The method of claim 1, wherein the lateraloxidation is performed at a temperature from about 400° C. to about 800°C.
 5. The method of claim 4, wherein the lateral oxidation is performedat a temperature of about 700° C.
 6. The method of claim 1, wherein thelateral oxidation is performed for a lateral oxidation time period thatis determined based on a gate length of the second FET.
 7. The method ofclaim 1, wherein encapsulating the first interfacial oxide layer of thefirst FET comprises depositing an oxidation-resistant material over thefirst FET.
 8. The method of claim 7, wherein the oxidation-resistantmaterial comprises silicon nitride.
 9. The method of claim 1, furthercomprising: forming an oxide liner over the first FET and the secondFET; removing the oxide liner from the first FET; forming firstoxidation-resistant material over the first FET, wherein forming thefirst oxidation-resistant material over the first FET comprisesencapsulating the first interfacial oxide layer of the first FET, andforming second oxidation-resistant material over the oxide liner on thesecond FET; and removing a portion of the oxide liner from the secondFET to expose the second interfacial oxide layer of the second FET. 10.The method of claim 1, wherein the lateral oxidation of the secondinterfacial oxide layer of the second FET further converts a portion ofthe substrate located adjacent to the second FET in the substrate intoexcess oxide.
 11. The method of claim 10, further comprising removingthe excess oxide from the substrate after the lateral oxidation to forma recess in the substrate adjacent to the second FET.
 12. The method ofclaim 11, further comprising forming gate and source/drain silicide forthe first and second FETs after performing lateral oxidation of thesecond interfacial oxide layer of the second FET, wherein thesource/drain silicide for the second FET is formed in the recess in thesubstrate adjacent to the second FET.
 13. The method of claim 1, whereinthe first FET comprises the first interfacial oxide layer located on thesubstrate, a first high-k dielectric layer located on the firstinterfacial oxide layer, and a first gate metal layer located on thefirst high-k dielectric layer; and wherein the second FET comprises thesecond interfacial oxide layer located on the substrate, a second high-kdielectric layer located on the second interfacial oxide layer, and asecond gate metal layer located on the second high-k dielectric layer.14. The method of claim 13, wherein the first FET further comprises afirst gate silicon layer located over the first gate metal layer, andthe second FET further comprises a second gate silicon layer locatedover the second gate metal layer, and further comprising: siliciding thefirst and second gate silicon layers after performing lateral oxidationof the second interfacial oxide layer of the second FET.
 15. Asemiconductor device, comprising: a first field effect transistor (FET)and a second FET located on a substrate, the first FET comprising afirst interfacial oxide layer, and the second FET comprising a secondinterfacial oxide layer, wherein the second interfacial oxide layer ofthe second FET is thicker than the first interfacial oxide layer of thefirst FET; and a recess located in the substrate adjacent to the secondFET.
 16. The semiconductor device of claim 15, wherein the first andsecond interfacial oxide layers comprise one of silicon oxide andsilicon oxynitride.
 17. The semiconductor device of claim 15, whereinthe substrate comprises one of silicon and silicon germanium.
 18. Thesemiconductor device of claim 15, wherein the first FET comprises thefirst interfacial oxide layer located on the substrate, a first high-kdielectric layer located on the first interfacial oxide layer, and afirst gate metal layer located on the first high-k dielectric layer; andwherein the second FET comprises the second interfacial oxide layerlocated on the substrate, a second high-k dielectric layer located onthe second interfacial oxide layer, and a second gate metal layerlocated on the second high-k dielectric layer.
 19. The semiconductordevice of claim 15, further comprising an oxide liner located over agate of the second FET, and oxidation-resistant material located overthe oxide liner.
 20. The semiconductor device of claim 15, furthercomprising an oxidation-resistant material encapsulating the first FET.